Quasi-LB Film: Are They Uniform?
*Data
taken in UCLA Nanolab using Nano-Or 3-D Scope 2000 for 2D profiles, and Dektak
8
profiler
to measure film thickness
50 microns
Average
“roughness” = 14 nm
Average “roughness” = 36 nm
“Roughness”
= Σ|(xi - xave)|/n
80 nm thick film
30 nm thick film