nOutput (Vg ) ±100 V quasi-AC
nSawtooth Waveform.
n
nOutput bias voltage (100mV)
nacross SD, and measure Isd
n
nMeasure Voltage across Rprot to get Ileakage
n
n
n
n
n
n
Measurement Setup
200 V
S
D
SiO2
p type Si back gate
Vg
Vsd
Isd
Rprot
VRprot
p-type in air