Quasi-LB Film: Are They Uniform?
*Data taken in UCLA Nanolab using Nano-Or 3-D Scope 2000 for 2D
profiles, and Dektak 8
profiler to measure film thickness
50
microns
Average “roughness”
= 14 nm
Average “roughness”
= 36 nm
“Roughness” = Σ|(xi - xave)|/n
80 nm thick film
30 nm thick film